Ohtsu, Y., Sakata, G., Schulze, J., Yasunaga, T., & Ikegami, Y. (2022). Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al ₂ O ₃ – ZnO targets. Japanese Journal of Applied Physics, 61(SI), SI1005. https://doi.org/10.35848/1347-4065/ac4a01 Cite

Horváth, B., Donkó, Z., Schulze, J., & Derzsi, A. (2022). The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas. Plasma Sources Science and Technology, 31(4), 045025. https://doi.org/10.1088/1361-6595/ac64bd Cite

Hübner, G., Bischoff, L., Korolov, I., Donkó, Z., Leimkühler, M., Liu, Y., Böke, M., Schulz-von der Gathen, V., Mussenbrock, T., & Schulze, J. (2022). The effects of the driving frequencies on micro atmospheric pressure He/N ₂ plasma jets driven by tailored voltage waveforms. Journal of Physics D: Applied Physics, 55(9), 095204. https://doi.org/10.1088/1361-6463/ac3791 Cite

Nguyen-Smith, R. T., Böddecker, A., Schücke, L., Bibinov, N., Korolov, I., Zhang, Q.-Z., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2022). μs and ns twin surface dielectric barrier discharges operated in air: from electrode erosion to plasma characteristics. Plasma Sources Science and Technology, 31(3), 035008. https://doi.org/10.1088/1361-6595/ac5452 Cite

Dong, W., Zhang, Y.-F., Dai, Z.-L., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2022). Hybrid simulation of instabilities in capacitively coupled RF CF ₄ /Ar plasmas. Plasma Sources Science and Technology, 31(2), 025006. https://doi.org/10.1088/1361-6595/ac47e4 Cite

Zaka-ul-Islam, M., & Schulze, J. (2022). Wave-like emission propagation and fine structures at the contact points of adjacent dielectric pellets in packed bed plasma reactors (PBPRs) operated in helium. AIP Advances, 12(1), 015128. https://doi.org/10.1063/5.0054208 Cite

Zhang, Q.-Z., Sun, J.-Y., Lu, W.-Q., Schulze, J., Guo, Y.-Q., & Wang, Y.-N. (2021). Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion. Physical Review E, 104(4), 045209. https://doi.org/10.1103/PhysRevE.104.045209 Cite

Ries, S., Schroeder, M., Woestefeld, M., Corbella, C., Korolov, I., Awakowicz, P., & Schulze, J. (2021). Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas. Review of Scientific Instruments, 92(10), 103503. https://doi.org/10.1063/5.0059658 Cite

He, Y., Preissing, P., Steuer, D., Klich, M., Schulz-von der Gathen, V., Böke, M., Korolov, I., Schulze, J., Guerra, V., Brinkmann, R. P., & Kemaneci, E. (2021). Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jets in binary and ternary mixtures of oxygen and nitrogen with helium background. Plasma Sources Science and Technology, 30(10), 105017. https://doi.org/10.1088/1361-6595/ac278d Cite

Vass, M., Wilczek, S., Schulze, J., & Donkó, Z. (2021). Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N ₂. Plasma Sources Science and Technology, 30(10), 105010. https://doi.org/10.1088/1361-6595/ac278c Cite

Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2021). Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges. Plasma Sources Science and Technology, 30(10), 10LT01. https://doi.org/10.1088/1361-6595/ac287b Cite

Schulenberg, D. A., Korolov, I., Donkó, Z., Derzsi, A., & Schulze, J. (2021). Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon. Plasma Sources Science and Technology, 30(10), 105003. https://doi.org/10.1088/1361-6595/ac2222 Cite

Ma, F.-F., Zhang, Q.-Z., Schulze, J., Sun, J.-Y., & Wang, Y.-N. (2021). Temporal evolution of plasma characteristics in synchronized dual-level RF pulsed capacitively coupled discharge. Plasma Sources Science and Technology, 30(10), 105018. https://doi.org/10.1088/1361-6595/ac2675 Cite

Korolov, I., Donkó, Z., Hübner, G., Liu, Y., Mussenbrock, T., & Schulze, J. (2021). Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N ₂ mixtures. Plasma Sources Science and Technology, 30(9), 095013. https://doi.org/10.1088/1361-6595/ac1c4d Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite

Zhang, Q.-Z., Nguyen-Smith, R. T., Beckfeld, F., Liu, Y., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2021). Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations. Plasma Sources Science and Technology, 30(7), 075017. https://doi.org/10.1088/1361-6595/abf598 Cite

Wang, J.-C., Tian, P., Kenney, J., Rauf, S., Korolov, I., & Schulze, J. (2021). Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation. Plasma Sources Science and Technology, 30(7), 075031. https://doi.org/10.1088/1361-6595/ac0da4 Cite

Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., & Donkó, Z. (2021). Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas. AIP Advances, 11(7), 075024. https://doi.org/10.1063/5.0055444 Cite

Wang, X.-Y., Liu, J.-R., Liu, Y.-X., Donkó, Z., Zhang, Q.-Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2021). Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration. Plasma Sources Science and Technology, 30(7), 075011. https://doi.org/10.1088/1361-6595/ac0b56 Cite

Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology, 30(6), 065015. https://doi.org/10.1088/1361-6595/ac0486 Cite

Liu, Y., Korolov, I., Trieschmann, J., Steuer, D., Schulz-von der Gathen, V., Böke, M., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Micro atmospheric pressure plasma jets excited in He/O ₂ by voltage waveform tailoring: a study based on a numerical hybrid model and experiments. Plasma Sources Science and Technology, 30(6), 064001. https://doi.org/10.1088/1361-6595/abd0e0 Cite

Steuer, D., Korolov, I., Chur, S., Schulze, J., Gathen, V. S. der, Golda, J., & Böke, M. (2021). 2D spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent. Journal of Physics D: Applied Physics, 54(35), 355204. https://doi.org/10.1088/1361-6463/ac09b9 Cite

Zaka-ul-Islam, M., Oteef, M. D. Y., Tu, X., & Schulze, J. (2021). Deposition of oxygenated hydrocarbons in a packed-bed plasma reactor during the oxidation of toluene: influence of applied voltage. Journal of Physics D: Applied Physics, 54(19), 194007. https://doi.org/10.1088/1361-6463/abe332 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite

Liu, Y., Korolov, I., Hemke, T., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O ₂ : A fluid dynamics approach. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/abf370 Cite

Korolov, I., Steuer, D., Bischoff, L., Hübner, G., Liu, Y., Schulz-von der Gathen, V., Böke, M., Mussenbrock, T., & Schulze, J. (2021). Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O ₂. Journal of Physics D: Applied Physics, 54(12), 125203. https://doi.org/10.1088/1361-6463/abd20e Cite

Vass, M., Derzsi, A., Schulze, J., & Donkó, Z. (2021). Intrasheath electron dynamics in low pressure capacitively coupled plasmas. Plasma Sources Science and Technology, 30(3), 03LT04. https://doi.org/10.1088/1361-6595/abe728 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges. J. Vac. Sci. Technol. A, 39, 063004. https://doi.org/10.1116/6.0001327 Cite

Ohtsu, Y., Imoto, S., Takemura, S., & Schulze, J. (2021). Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation. Vacuum, 193, 110531. https://doi.org/10.1016/j.vacuum.2021.110531 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite

Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite

Zhang, Q.-Z., Zhang, L., Yang, D.-Z., Schulze, J., Wang, Y.-N., & Bogaerts, A. (2021). Positive and negative streamer propagation in volume dielectric barrier discharges with planar and porous electrodes. Plasma Processes and Polymers, 18(4), 2000234. https://doi.org/10.1002/ppap.202000234 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite

Zhao, K., Su, Z.-X., Liu, J.-R., Liu, Y.-X., Zhang, Y.-R., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2020). Suppression of nonlinear standing wave excitation via the electrical asymmetry effect. Plasma Sources Science and Technology, 29(12), 124001. https://doi.org/10.1088/1361-6595/abc6f7 Cite

Preissing, P., Korolov, I., Schulze, J., Schulz-von der Gathen, V., & Böke, M. (2020). Three-dimensional density distributions of NO in the effluent of the COST reference microplasma jet operated in He/N ₂ /O ₂. Plasma Sources Science and Technology, 29(12), 125001. https://doi.org/10.1088/1361-6595/abbd86 Cite

Liu, Y.-X., Wang, X.-Y., Zhang, Q.-Z., Donkó, Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2020). Avalanche induced rapid impedance change and electron power absorption during gas breakdown under radio-frequency excitation. Plasma Sources Science and Technology, 29(12), 12LT03. https://doi.org/10.1088/1361-6595/abcc7a Cite

Schücke, L., Gembus, J.-L., Peters, N., Kogelheide, F., Nguyen-Smith, R. T., Gibson, A. R., Schulze, J., Muhler, M., & Awakowicz, P. (2020). Conversion of volatile organic compounds in a twin surface dielectric barrier discharge. Plasma Sources Science and Technology, 29(11), 114003. https://doi.org/10.1088/1361-6595/abae0b Cite

Ohtsu, Y., Nakashima, T., Tanaka, R., & Schulze, J. (2020). Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization. Vacuum, 181, 109593. https://doi.org/10.1016/j.vacuum.2020.109593 Cite

Wang, L., Wen, D.-Q., Hartmann, P., Donkó, Z., Derzsi, A., Wang, X.-F., Song, Y.-H., Wang, Y.-N., & Schulze, J. (2020). Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges. Plasma Sources Science and Technology, 29(10), 105004. https://doi.org/10.1088/1361-6595/abb2e7 Cite

Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure. Plasma Sources Science and Technology, 29(8), 085014. https://doi.org/10.1088/1361-6595/aba111 Cite

Oberberg, M., Berger, B., Buschheuer, M., Engel, D., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2020). The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O ₂. Plasma Sources Science and Technology, 29(7), 075013. https://doi.org/10.1088/1361-6595/ab9b31 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2020). Charged particle dynamics and distribution functions in low pressure dual-frequency capacitively coupled plasmas operated at low frequencies and high voltages. Journal of Applied Physics, 54, 075014. https://doi.org/10.1088/1361-6595/ab9374 Cite

Derzsi, A., Horváth, B., Donkó, Z., & Schulze, J. (2020). Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms. Plasma Sources Science and Technology, 29(7), 074001. https://doi.org/10.1088/1361-6595/ab9156 Cite

Wilczek, S., Schulze, J., Brinkmann, R. P., Donkó, Z., Trieschmann, J., & Mussenbrock, T. (2020). Electron dynamics in low pressure capacitively coupled radio frequency discharges. Journal of Applied Physics, 127(18), 181101. https://doi.org/10.1063/5.0003114 Cite

Horváth, B., Derzsi, A., Schulze, J., Korolov, I., Hartmann, P., & Donkó, Z. (2020). Experimental and kinetic simulation study of electron power absorption mode transitions in capacitive radiofrequency discharges in neon. Plasma Sources Science and Technology, 29(5), 055002. https://doi.org/10.1088/1361-6595/ab8176 Cite

Korolov, I., Leimkühler, M., Böke, M., Donkó, Z., Schulz-von der Gathen, V., Bischoff, L., Hübner, G., Hartmann, P., Gans, T., Liu, Y., Mussenbrock, T., & Schulze, J. (2020). Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N ₂. Journal of Physics D: Applied Physics, 53(18), 185201. https://doi.org/10.1088/1361-6463/ab6d97 Cite

Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2020). Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas. Plasma Sources Science and Technology, 29(2), 025019. https://doi.org/10.1088/1361-6595/ab5f27 Cite

Kogelheide, F., Offerhaus, B., Bibinov, N., Krajinski, P., Schücke, L., Schulze, J., Stapelmann, K., & Awakowicz, P. (2020). Characterisation of volume and surface dielectric barrier discharges in N ₂ –O ₂ mixtures using optical emission spectroscopy. Plasma Processes and Polymers, 17(6), 1900126. https://doi.org/10.1002/ppap.201900126 Cite

Banko, L., Ries, S., Grochla, D., Arghavani, M., Salomon, S., Pfetzing-Micklich, J., Kostka, A., Rogalla, D., Schulze, J., Awakowicz, P., & Ludwig, A. (2019). Effects of the Ion to Growth Flux Ratio on the Constitution and Mechanical Properties of Cr _{1– x} -Al _x -N Thin Films. ACS Combinatorial Science, 21(12), 782–793. https://doi.org/10.1021/acscombsci.9b00123 Cite

Oberberg, M., Engel, D., Berger, B., Wölfel, C., Eremin, D., Lunze, J., Brinkmann, R. P., Awakowicz, P., & Schulze, J. (2019). Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge. Plasma Sources Science and Technology, 28(11), 115021. https://doi.org/10.1088/1361-6595/ab53a0 Cite