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Vass, M., Wang, L., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2022). Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis. Plasma Sources Science and Technology, 31(11), 115004. https://doi.org/10.1088/1361-6595/ac9754 Cite

Wang, L., Vass, M., Lafleur, T., Donkó, Z., Song, Y.-H., & Schulze, J. (2022). On the validity of the classical plasma conductivity in capacitive RF discharges. Plasma Sources Science and Technology, 31(10), 105013. https://doi.org/10.1088/1361-6595/ac95c1 Cite

Fu, Y.-Y., Wang, X.-K., Liu, Y.-X., Schulze, J., Donkó, Z., & Wang, Y.-N. (2022). Effects of ‘step-like’ amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental investigation. Plasma Sources Science and Technology, 31(8), 085005. https://doi.org/10.1088/1361-6595/ac81e9 Cite

Ohtsu, Y., Sakata, G., Schulze, J., Yasunaga, T., & Ikegami, Y. (2022). Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al ₂ O ₃ – ZnO targets. Japanese Journal of Applied Physics, 61(SI), SI1005. https://doi.org/10.35848/1347-4065/ac4a01 Cite

Roggendorf, J., Berger, B., Eremin, D., Oberberg, M., Engel, D., Wölfel, C., Zhang, Q.-Z., Awakowicz, P., Lunze, J., & Schulze, J. (2022). Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes. Plasma Sources Science and Technology, 31(6), 065007. https://doi.org/10.1088/1361-6595/ac7413 Cite

Wang, X.-K., Wang, X.-Y., Liu, Y.-X., Schulze, J., Donkó, Z., & Wang, Y.-N. (2022). Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF ₄ plasmas. Plasma Sources Science and Technology, 31(6), 064002. https://doi.org/10.1088/1361-6595/ac6692 Cite

Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2022). Electropositive core in electronegative magnetized capacitive radio frequency plasmas. Plasma Sources Science and Technology, 31(6), 06LT01. https://doi.org/10.1088/1361-6595/ac5ec7 Cite

Hartmann, P., Korolov, I., Escandón-López, J., van Gennip, W., Buskes, K., & Schulze, J. (2022). Control of ion flux-energy distributions by low frequency square-shaped tailored voltage waveforms in capacitively coupled plasmas. Plasma Sources Science and Technology, 31(5), 055017. https://doi.org/10.1088/1361-6595/ac6e05 Cite

Li, T., Yan, H.-J., Li, J.-Q., Schulze, J., Yu, S.-Q., Song, J., & Zhang, Q.-Z. (2022). The role of surface charge and its decay in surface dielectric barrier discharges. Plasma Sources Science and Technology, 31(5), 055016. https://doi.org/10.1088/1361-6595/ac676e Cite

Sun, J.-Y., Zhang, Q.-Z., Schulze, J., & Wang, Y.-N. (2022). Collisionless magnetized sheath resonance heating induced by a transverse magnetic field in low-pressure capacitive rf discharges. Plasma Sources Science and Technology, 31(4), 045011. https://doi.org/10.1088/1361-6595/ac5ecb Cite

Horváth, B., Donkó, Z., Schulze, J., & Derzsi, A. (2022). The critical role of electron induced secondary electrons in high-voltage and low-pressure capacitively coupled oxygen plasmas. Plasma Sources Science and Technology, 31(4), 045025. https://doi.org/10.1088/1361-6595/ac64bd Cite

Hübner, G., Bischoff, L., Korolov, I., Donkó, Z., Leimkühler, M., Liu, Y., Böke, M., Schulz-von der Gathen, V., Mussenbrock, T., & Schulze, J. (2022). The effects of the driving frequencies on micro atmospheric pressure He/N ₂ plasma jets driven by tailored voltage waveforms. Journal of Physics D: Applied Physics, 55(9), 095204. https://doi.org/10.1088/1361-6463/ac3791 Cite

Nguyen-Smith, R. T., Böddecker, A., Schücke, L., Bibinov, N., Korolov, I., Zhang, Q.-Z., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2022). μs and ns twin surface dielectric barrier discharges operated in air: from electrode erosion to plasma characteristics. Plasma Sources Science and Technology, 31(3), 035008. https://doi.org/10.1088/1361-6595/ac5452 Cite

Dong, W., Zhang, Y.-F., Dai, Z.-L., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2022). Hybrid simulation of instabilities in capacitively coupled RF CF ₄ /Ar plasmas. Plasma Sources Science and Technology, 31(2), 025006. https://doi.org/10.1088/1361-6595/ac47e4 Cite

Zaka-ul-Islam, M., & Schulze, J. (2022). Wave-like emission propagation and fine structures at the contact points of adjacent dielectric pellets in packed bed plasma reactors (PBPRs) operated in helium. AIP Advances, 12(1), 015128. https://doi.org/10.1063/5.0054208 Cite

Ohtsu, Y., Yasuda, K., & Schulze, J. (2022). Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma. Journal of Vacuum Science & Technology A, 40(5), 053006. https://doi.org/10.1116/6.0001994 Cite

Yasuda, K., Ohtsu, Y., & Schulze, J. (2022). Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization. Vacuum, 202, 111184. https://doi.org/10.1016/j.vacuum.2022.111184 Cite

Ohtsu, Y., Amzad Hossain, M., & Schulze, J. (2022). Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources. In Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources (Vol. 56). Nova Science Publishers. https://novapublishers.com/shop/advances-in-materials-science-research-volume-56/ Cite

Derzsi, A., Hartmann, P., Vass, M., Horváth, B., Gyulai, M., Korolov, I., Schulze, J., & Donko, Z. (2022). Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results. Plasma Sources Sci. Technol., 22. Cite

Zhang, Q.-Z., Sun, J.-Y., Lu, W.-Q., Schulze, J., Guo, Y.-Q., & Wang, Y.-N. (2021). Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion. Physical Review E, 104(4), 045209. https://doi.org/10.1103/PhysRevE.104.045209 Cite

Ries, S., Schroeder, M., Woestefeld, M., Corbella, C., Korolov, I., Awakowicz, P., & Schulze, J. (2021). Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas. Review of Scientific Instruments, 92(10), 103503. https://doi.org/10.1063/5.0059658 Cite

He, Y., Preissing, P., Steuer, D., Klich, M., Schulz-von der Gathen, V., Böke, M., Korolov, I., Schulze, J., Guerra, V., Brinkmann, R. P., & Kemaneci, E. (2021). Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jets in binary and ternary mixtures of oxygen and nitrogen with helium background. Plasma Sources Science and Technology, 30(10), 105017. https://doi.org/10.1088/1361-6595/ac278d Cite

Vass, M., Wilczek, S., Schulze, J., & Donkó, Z. (2021). Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N ₂. Plasma Sources Science and Technology, 30(10), 105010. https://doi.org/10.1088/1361-6595/ac278c Cite

Wang, L., Vass, M., Donkó, Z., Hartmann, P., Derzsi, A., Song, Y.-H., & Schulze, J. (2021). Magnetic attenuation of the self-excitation of the plasma series resonance in low-pressure capacitively coupled discharges. Plasma Sources Science and Technology, 30(10), 10LT01. https://doi.org/10.1088/1361-6595/ac287b Cite

Schulenberg, D. A., Korolov, I., Donkó, Z., Derzsi, A., & Schulze, J. (2021). Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon. Plasma Sources Science and Technology, 30(10), 105003. https://doi.org/10.1088/1361-6595/ac2222 Cite

Ma, F.-F., Zhang, Q.-Z., Schulze, J., Sun, J.-Y., & Wang, Y.-N. (2021). Temporal evolution of plasma characteristics in synchronized dual-level RF pulsed capacitively coupled discharge. Plasma Sources Science and Technology, 30(10), 105018. https://doi.org/10.1088/1361-6595/ac2675 Cite

Korolov, I., Donkó, Z., Hübner, G., Liu, Y., Mussenbrock, T., & Schulze, J. (2021). Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N ₂ mixtures. Plasma Sources Science and Technology, 30(9), 095013. https://doi.org/10.1088/1361-6595/ac1c4d Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas. Plasma Sources Science and Technology, 30(8), 085011. https://doi.org/10.1088/1361-6595/abf206 Cite

Zhang, Q.-Z., Nguyen-Smith, R. T., Beckfeld, F., Liu, Y., Mussenbrock, T., Awakowicz, P., & Schulze, J. (2021). Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations. Plasma Sources Science and Technology, 30(7), 075017. https://doi.org/10.1088/1361-6595/abf598 Cite

Wang, J.-C., Tian, P., Kenney, J., Rauf, S., Korolov, I., & Schulze, J. (2021). Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation. Plasma Sources Science and Technology, 30(7), 075031. https://doi.org/10.1088/1361-6595/ac0da4 Cite

Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., & Donkó, Z. (2021). Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas. AIP Advances, 11(7), 075024. https://doi.org/10.1063/5.0055444 Cite

Wang, X.-Y., Liu, J.-R., Liu, Y.-X., Donkó, Z., Zhang, Q.-Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2021). Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration. Plasma Sources Science and Technology, 30(7), 075011. https://doi.org/10.1088/1361-6595/ac0b56 Cite

Vass, M., Wilczek, S., Lafleur, T., Brinkmann, R. P., Donkó, Z., & Schulze, J. (2021). Collisional electron momentum loss in low temperature plasmas: on the validity of the classical approximation. Plasma Sources Science and Technology, 30(6), 065015. https://doi.org/10.1088/1361-6595/ac0486 Cite

Liu, Y., Korolov, I., Trieschmann, J., Steuer, D., Schulz-von der Gathen, V., Böke, M., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Micro atmospheric pressure plasma jets excited in He/O ₂ by voltage waveform tailoring: a study based on a numerical hybrid model and experiments. Plasma Sources Science and Technology, 30(6), 064001. https://doi.org/10.1088/1361-6595/abd0e0 Cite

Steuer, D., Korolov, I., Chur, S., Schulze, J., Gathen, V. S. der, Golda, J., & Böke, M. (2021). 2D spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent. Journal of Physics D: Applied Physics, 54(35), 355204. https://doi.org/10.1088/1361-6463/ac09b9 Cite

Zaka-ul-Islam, M., Oteef, M. D. Y., Tu, X., & Schulze, J. (2021). Deposition of oxygenated hydrocarbons in a packed-bed plasma reactor during the oxidation of toluene: influence of applied voltage. Journal of Physics D: Applied Physics, 54(19), 194007. https://doi.org/10.1088/1361-6463/abe332 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms. Plasma Sources Science and Technology, 30(5), 054001. https://doi.org/10.1088/1361-6595/abf31d Cite

Liu, Y., Korolov, I., Hemke, T., Bischoff, L., Hübner, G., Schulze, J., & Mussenbrock, T. (2021). Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O ₂ : A fluid dynamics approach. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/abf370 Cite

Korolov, I., Steuer, D., Bischoff, L., Hübner, G., Liu, Y., Schulz-von der Gathen, V., Böke, M., Mussenbrock, T., & Schulze, J. (2021). Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O ₂. Journal of Physics D: Applied Physics, 54(12), 125203. https://doi.org/10.1088/1361-6463/abd20e Cite

Vass, M., Derzsi, A., Schulze, J., & Donkó, Z. (2021). Intrasheath electron dynamics in low pressure capacitively coupled plasmas. Plasma Sources Science and Technology, 30(3), 03LT04. https://doi.org/10.1088/1361-6595/abe728 Cite

Wang, L., Hartmann, P., Donkó, Z., Song, Y.-H., & Schulze, J. (2021). Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges. J. Vac. Sci. Technol. A, 39, 063004. https://doi.org/10.1116/6.0001327 Cite

Ohtsu, Y., Imoto, S., Takemura, S., & Schulze, J. (2021). Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation. Vacuum, 193, 110531. https://doi.org/10.1016/j.vacuum.2021.110531 Cite

Woelfel, C., Oberberg, M., Berger, B., Engel, D., Brinkmann, R. P., Schulze, J., Awakowicz, P., & Lunze, J. (2021). Control-oriented plasma modeling and controller design for reactive sputtering. IFAC Journal of Systems and Control, 16, 100142. https://doi.org/10.1016/j.ifacsc.2021.100142 Cite

Liu, Y., Trieschmann, J., Berger, B., Schulze, J., & Mussenbrock, T. (2021). Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field. Physics of Plasmas, 28(5), 053505. https://doi.org/10.1063/5.0045947 Cite

Zhang, Q.-Z., Zhang, L., Yang, D.-Z., Schulze, J., Wang, Y.-N., & Bogaerts, A. (2021). Positive and negative streamer propagation in volume dielectric barrier discharges with planar and porous electrodes. Plasma Processes and Polymers, 18(4), 2000234. https://doi.org/10.1002/ppap.202000234 Cite

Hartmann, P., Wang, L., Nösges, K., Berger, B., Wilczek, S., Brinkmann, R. P., Mussenbrock, T., Juhasz, Z., Donkó, Z., Derzsi, A., Lee, E., & Schulze, J. (2021). Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features. Journal of Physics D: Applied Physics, 54, 255202. https://doi.org/10.1088/1361-6463/abf229 Cite

Zhao, K., Su, Z.-X., Liu, J.-R., Liu, Y.-X., Zhang, Y.-R., Schulze, J., Song, Y.-H., & Wang, Y.-N. (2020). Suppression of nonlinear standing wave excitation via the electrical asymmetry effect. Plasma Sources Science and Technology, 29(12), 124001. https://doi.org/10.1088/1361-6595/abc6f7 Cite

Preissing, P., Korolov, I., Schulze, J., Schulz-von der Gathen, V., & Böke, M. (2020). Three-dimensional density distributions of NO in the effluent of the COST reference microplasma jet operated in He/N ₂ /O ₂. Plasma Sources Science and Technology, 29(12), 125001. https://doi.org/10.1088/1361-6595/abbd86 Cite

Liu, Y.-X., Wang, X.-Y., Zhang, Q.-Z., Donkó, Z., Zhao, K., Schulze, J., & Wang, Y.-N. (2020). Avalanche induced rapid impedance change and electron power absorption during gas breakdown under radio-frequency excitation. Plasma Sources Science and Technology, 29(12), 12LT03. https://doi.org/10.1088/1361-6595/abcc7a Cite